Multi-Purpose: SLA Series
The Smart Link Advantage (SLA) Series is Brooks’ premier smart digital mass flow series. SLA MFC and MFM link to advanced service tools and offer the advantage of digital protocols. The SLA Series provides many advanced features such as enhanced long-term stability, improved turndown and more.
Brooks SLAMf series is an extension of the SLA series designed for use in harsh environments. Their unique NEMA 4X/IP66 enclosure makes them suitable for outdoor use and in wash down applications. These devices are a cost effective solution for hazardous area installations.
Type | Model | Full-Scale Capacity N2 Eq. | Max Pressure bar g | Accuracy | Input/Output | Power Supply |
Elastomer Seal Controller/Meter | SLA series | 3 sccm-2500 slpm | 310 | 0.9% rate | 0(1)-5 Vdc / 0-10 Vdc/ 0(4)-20 mA RS485 / DeviceNet / Profibus / Foundation Fieldbus | 11-27 Vdc* |
Multi-Purpose: GF40/80 Series, 4800 Series and E&I Series
GF40/80 Series: Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions. This series offers MultiFlo gas and range configurability, where onsite adjustments by the user can be made to adapt to different gas types and flow range.
Type | Model | Full-Scale Capacity N2 Eq. | Max Pressure bar g | Accuracy | Input/Output | Power Supply |
Elastomer Seal Controller/Meter | GF40 | 3 sccm-50slpm | 10 | +1% rate | 0-5 Vdc / 0-10 Vdc/ 0-20 mA, 4-20 mA / Profibus / RS485 / Devicenet / EtherCAT | 11-27 Vdc* |
Metal Seal Controller/Meter | GF80 | 3 sccm-50slpm | 10 | +1% rate | 0-5 Vdc / 0-10 Vdc/ 0-20 mA, 4-20 mA / Profibus / RS485 / Devicenet / EtherCAT | 11-27 Vdc* |
GF81 | 51 slpm – 300 slpm | Meter: 5 Controller: 10 |
4800 Series: Broad flow range, compact size and MEMS-based sensor for lightning response times with integrated display.
Type | Model | Full-Scale Capacity N2 Eq. | Max Pressure bar g | Accuracy | Input/Output | Power Supply |
Elastomer Seal Controller/Meter | 4800 series | 50 sccm-40 slpm | 10 | +1% FS or +3% FS | 0-5 Vdc /4-20 mA RS232 | 15-24Vdc |
E and I Series: Analogue MFC and MFM for highest durability.
Type | Model | Full-Scale Capacity N2 Eq. | Max Pressure bar g | Accuracy | Input/Output | Power Supply |
Elastomer Seal Controller/Meter | 5800E series | 3 sccm-1000 slpm | 100 | 1% FS | 0-5 Vdc | +/-15V dc |
Elastomer Seal Controller/Meter | 5800i series | 3 sccm-1000 slpm | 100 | 1% FS | 0-5 Vdc / 4-20 mA | 15-24 Vdc |
Ultra/High Purity: GF100Series, GF100 High Flow Series, GF135Series
Our GF100and GF135 series are designed for applications that require a high purity all-metal flow path. Applications include: semiconductor, MOCVD, semiconductor etch, thin film and other advanced process gas control applications.
These series have been marathon-tested toover three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time.
Models within the series have their own differentiators. Contact us for selection.
Coriolis MFC and MFM
Primary use is for liquids, though also suitable for use with gases, Quantim is the first Coriolis MFC that measures and controls flow without any need to compensate for fluid properties or process conditions. Quantim’sCoriolis technology, internal control valve and PID bring a new level of measurement accuracy and control in one compact package. Also available as MFM.
Coriolis meters and controllers are available in NEMA 1/IP40, NEMA 4X/IP66, explosion proof and ANSI/ISA-76 downport configurations.
Type | Model | Tube Size | Nominal Flows Liquid (kg/hr)/gas (lpm) | Accuracy | Max Pressure (bar) | Input/Output |
Precision Mass Flow Controller Gas and Liquid | QMBC | 2 | 0.15/1.05 | +/-0.2%, 0.5% or 1% rate | 35,100,300 | 0-5 Vdc, 4-20 mA or HART |
3 | 0.78/2.96 | |||||
4 | 7.97/24.8 |